JPH0416343U - - Google Patents

Info

Publication number
JPH0416343U
JPH0416343U JP5672390U JP5672390U JPH0416343U JP H0416343 U JPH0416343 U JP H0416343U JP 5672390 U JP5672390 U JP 5672390U JP 5672390 U JP5672390 U JP 5672390U JP H0416343 U JPH0416343 U JP H0416343U
Authority
JP
Japan
Prior art keywords
sample
temperature
substrate
blowout port
cover
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5672390U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5672390U priority Critical patent/JPH0416343U/ja
Publication of JPH0416343U publication Critical patent/JPH0416343U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Electric Properties And Detecting Electric Faults (AREA)
  • Testing Resistance To Weather, Investigating Materials By Mechanical Methods (AREA)
JP5672390U 1990-05-30 1990-05-30 Pending JPH0416343U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5672390U JPH0416343U (en]) 1990-05-30 1990-05-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5672390U JPH0416343U (en]) 1990-05-30 1990-05-30

Publications (1)

Publication Number Publication Date
JPH0416343U true JPH0416343U (en]) 1992-02-10

Family

ID=31580801

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5672390U Pending JPH0416343U (en]) 1990-05-30 1990-05-30

Country Status (1)

Country Link
JP (1) JPH0416343U (en])

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